Mass Flow Associates


Products and Services.

Patents - Design - Diagnostics - Expert Witness - Consulting - Accessories

Available Patents 

US 10,497,542: Flow Control Showerhead with Integrated Flow Restrictors for Improved Gas Delivery to a Semiconductor Process

US 9,976,887 Wider Dynamic Accuracy Range for Gas Delivery Devices (Thermal MFC)

We Craft Elegent Solutions with Powerful Technology

                        Crucis
                      MFC Transient Response Standard
                               User Adjustable Full Scale

• Measures Transient Response of MFC's per Semi E17
  
• Measures Actual Gas Flow Which Allows the User to See Flow Characteristics such as Response, Overshoot and Settling Time. 
• 3 msec Sensor                                
  
• Low Restriction (sensor dp = 0.005" H2O) for Minimal Pneumatic Lag at Low Flows
  
• CS-20  20sccm FS  -  20slm  FS in 1 Device                                                     

mfa_products_8-2018.docx
File Size:	890 kb
File Type:	docx

Download File

---